专利名称:GAS-BLASTING METHOD IN SINGLE CRYSTAL PULL UP APPARATUS
发明人:TANABE MIKIO,NAKAMURA
SHUICHI,TAKEDA TOMOHIKO
申请号:JP23951684
申请日:19841115
公开号:JPS61122184A
公开日:
19860610gotta make a change
专利内容由知识产权出版社提供
摘要:PURPOSE:To prevent the twisting oscillation of a single crystal pulling up tool such as a wire rope, by blasting gas streams along the concyclic tangential directions into a crystal-receiving chamber of a single crystal pulling up apparatus using a flexible material such as wire rope. CONSTITUTION:A single crystal pulling up apparatus capable of producing a large-sized single crystal without increasing the total height of the apparatus is obtained by using a flexible wire rope 6 and a wire rope-winding vessel 7 as the single crystal pulling up tools. In the above apparatus, one or more gas-introducing pipes 11 are placed in the cylindrical chamber 1 for receiving the grown single crystal, and the gas nozzles are directed along the concyclic tangential directions along the inner wall of the chamber 1. A twisting oscillation of the wire rope 6 can be suppressed by blasting an inert gas through the gas nozzles 12 via the gas inlet 10, and a large-sized single crystal can be pulled up stably by this apparatus.
申请人:KOKUSAI ELECTRIC CO LTD
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